Applications
- Gas panels for OEM tools
- Semiconductor, flat panel display and photovoltaic production
- Specialty and bulk-gas distribution
Special Features
- High accuracy pressure measurement 0.15% RSS (or 0.3% BFSL)
- Vacuum referenced pressure readings
- Excellent long term stability
- Signal noise cancellation and shielding
- 2.4711/UNSR 30003 thin film sensor
- Active temperature compensation
- Hermetically sealed (NEMA4 / IP67)
- ATEX Zone 2
- RoHS compliant
- Compact design
|
Fig. left Transducer WU-20, Single End Fig. right Transducer WU-25, Flow Through Fig. right Transducer WU-26, Modular Surface Mount
|