Ultra High Purity Transducer, Ex nA nL
Type WU-20, WU-25 and WU-26


Applications

  • Gas panels for OEM tools
  • Semiconductor, flat panel display and photovoltaic production
  • Specialty and bulk-gas distribution

Special Features

  • High accuracy pressure measurement 0.15% RSS (or 0.3% BFSL)
  • Vacuum referenced pressure readings
  • Excellent long term stability
  • Signal noise cancellation and shielding
  • 2.4711/UNSR 30003 thin film sensor
  • Active temperature compensation
  • Hermetically sealed (NEMA4 / IP67)
  • ATEX Zone 2
  • RoHS compliant 
  • Compact design

Fig. left Transducer WU-20, Single End
Fig. right Transducer WU-25, Flow Through
Fig. right Transducer WU-26, Modular Surface Mount

 
© 2010 - WIKA Instrument Corporation

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